Abstract: This article uses the ARL Perform'X-ray fluorescence spectrometer to analyze the elemental composition of vanadium titanium series denitrification catalysts in various aspects, and examines the accuracy and precision of the analysis results. The experiment shows that X-ray fluorescence spectroscopy (XRF) is fully capable of monitoring the catalyst components in denitrification processes, and can provide support for actual production and optimization of denitrification processes.